4.7 Article

Fabrication of N-doped 3C-SiC nanobelts with selected (1(1)over-bar0) top surface and their enhanced transverse piezoresistance behaviours

Journal

CERAMICS INTERNATIONAL
Volume 44, Issue 15, Pages 19021-19027

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2018.07.020

Keywords

N-doped SiC nanobelts; (1(1)over-bar0) top surface; Piezoresistance behaviour; Gauge factor; High sensitivity

Funding

  1. National Natural Science Foundation of 19026 China (NSFC) [51572133, 51672137, 51702174, 51702175]
  2. Zhejiang Provincial Nature Science Foundation [LQ17E020002]
  3. Natural Science Foundation of Ningbo Municipal Government [2016A610103, 2017A610002]

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The piezoresistive effect of SiC low-dimensional nanostructures, together with their exclusive benefits of superior mechanical characteristics and could be integrated into the flexible devices that can withdraw large strain, promise to make a wide range of sensing devices application possible in the severe working conditions. In this work, we reported the transverse piezoresistance behaviours of n-type 3C-SiC nanobelts with selected (1 (1) over bar0) top surface and N dopants. The single-crystalline SiC nanobelts were achieved by the means of direct pyrolysis of polymeric precursors without catalysts, which had an average N doping level of similar to 6.02 at% and a typical width to -thickness ratio of similar to 8. It was disclosed that the transverse piezoresistance coefficient 7rinoi reached the maximum 10.29 x 10(-11) Pa-1 at a fixed external stress of 67.03 nN. Correspondingly, the gauge factor (GF) was calculated to be of similar to 61.7, which is higher than all the reported n-type SiC, intrinsic SiC, as well as most of the p type SiC counterparted. The findings shed light on the fact that present is-type SiC nanobelts have the potential of becoming an outstanding contestant for the development of robust pressure sensors having elevated sensitivities.

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