Journal
2015 45TH EUROPEAN MICROWAVE CONFERENCE (EUMC)
Volume -, Issue -, Pages 163-166Publisher
IEEE
Keywords
high frequency (HF) probe; ground-signal-ground (GSG) probe; on-wafer measurements; microwave nanodevices
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This work describes a new generation of instrumentation that aims to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up with a vector network analyzer, a scanning electron microscope and miniaturized ground-signal-ground probes fabricated using silicon-on-insulator technology with contact sizes of 2 mu m(2). Dedicated calibration standards are developed and the proof of concept of the operability of this novel system is demonstrated by first calibrated on-wafer microwave measurements up to 4 GHz.
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