4.6 Article

Reduction of thermal conductivity by surface scattering of phonons in periodic silicon nanostructures

Journal

PHYSICAL REVIEW B
Volume 93, Issue 4, Pages -

Publisher

AMER PHYSICAL SOC
DOI: 10.1103/PhysRevB.93.045411

Keywords

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Funding

  1. Project for Developing Innovation Systems of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, Kakenhi [25709090, 15K13270]
  2. Foundation for the Promotion of Industrial Science
  3. Grants-in-Aid for Scientific Research [25709090, 15K13270] Funding Source: KAKEN

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We investigate the impact of various phonon-scattering mechanisms on the in-plane thermal conductivity of suspended silicon thin films with two-dimensional periodic arrays of holes, i.e., phononic crystal (PnC) nanostructures. A large amount of data on the PnC structures with square, hexagonal, and honeycomb lattices reveals that the thermal conductivity is mostly determined by the surface-to-volume ratio. However, as the characteristic size of the structure is reduced down to several tens of nanometers, thermal conductivity becomes independent of the surface-to-volume ratio, lattice type, and other geometrical parameters, being controlled solely by the distance between adjacent holes (neck size).

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