Journal
APPLIED SURFACE SCIENCE
Volume 457, Issue -, Pages 388-395Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2018.06.249
Keywords
F-DLC film; Fullerene-like nanostructure; Mechanical properties; Tribological properties
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Funding
- National Natural Science Foundation of China [51602122]
- National Key Research and Development Program of China [2016YFA0200400]
- Program for JLU Science and Technology Innovative Research Team [2017TD-09]
- Innovation Foundation of the 46th Research Institute of China Electronics Technology Group Corporation Program [CJ20160902]
- China postdoctoral Science Foundation [2016 M600229, 2017 T100207]
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Fluorine incorporation can tune the properties of diamond-like carbon (DLC) films particularly to the tribological behaviors, which is closely related to the film inner structural transformation and ultimately influenced by the fluorine content variation. In order to demonstrate it visually, in this work, a special fullerene-like nanostructure is intentionally designed in F-DLC amorphous matrix and then the fluorine content is adjusted by artificial regulation, eventually the film structure evolution is observed directly by Raman, XPS and TEM. Subsequent mechanical and tribological measurements discover the related performance difference between all films, which reveals that the fluorine-containing fullerene-like carbon (F-FLC) film with lowest fluorine content (4.8 at.%) has the lowest friction coefficient (0.052) and wear rate (0.32 x 10(-)(16) m(3)/Nm) in ambient environment, due to the special microstructure. In addition, the inert atmosphere is beneficial to the formation of C-phase tribofilms, not the tribo-oxidation, in which all the films and especially the F-FLC film have the lower friction coefficients.
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