Journal
APPLIED SURFACE SCIENCE
Volume 439, Issue -, Pages 222-225Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2018.01.050
Keywords
High-entropy alloy film; Nanocrystalline; Nano-twin; Mechanical properties; Resistivity
Categories
Funding
- Natural Science Foundation of China [51371050]
- Key Research Project, Jiangsu Province, China [BE2015097]
- Industry-University Strategic Research Fund of Jiangsu Province [BY2016076-08]
- 'Six Talent Peaks' Project of Jiangsu Province [2015-XCL-004]
- 'Scientific Research Foundation' project of the Graduate School of Southeast University [YBJJ1726]
- Australian Research Council Discovery Projects
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Nano-twinned, nanocrystalline CoCrFeNi high-entropy alloy films were produced by magnetron sputtering. The films exhibit a high hardness of 8.5 GPa, the elastic modulus of 161.9 GPa and the resistivity as high as 135.1 mu Omega.cm. The outstanding mechanical properties were found to result from the resistance of deformation created by nanocrystalline grains and nano-twins, while the electrical resistivity was attributed to the strong blockage effect induced by grain boundaries and lattice distortions. The results lay a solid foundation for the development of advanced films with structural and functional properties combined in micro-/nano-electronic devices. (C) 2018 Elsevier B.V. All rights reserved.
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