Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.5008595
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Funding
- Japan Society for the Promotion of Science [26709025, 17H03251]
- Hibi Science Foundation
- Nippon Sheet Glass Foundation for Materials Science and Engineering
- Grants-in-Aid for Scientific Research [26709025, 17H03251] Funding Source: KAKEN
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We report the development of a microcavity drum sealed by suspended graphene. The drum is fabricated by using a low-pressure dry-transfer technique, which involves vacuum de-aeration between a graphene sheet and a substrate and raising the temperature to above the glass transition of the supporting poly(methyl methacrylate) film, which serves to increase the real contact area. The result is a suspended graphene sheet with a maximum diameter of 48.6 mu m. The Raman spectrum of the suspended graphene has a 2D/G ratio of 1.79 and a few D peaks, which suggests that the material is high-quality single-layer graphene. The dry-transfer technique yields a vacuum-sealed microcavity drum 1.1 mu m deep up to 4.5 mu m in diameter. The Raman shift indicates that the suspended graphene is subjected to a tensile strain of 0.05%, which is attributed to the pressure difference between the evacuated cavity and the exterior gas. Published by AIP Publishing.
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