Experimental Study of Laser Etching on Al2O3-SiC Composite Ceramics

Analyze the composition of micro area of the laser etched surface via X-Ray Energy Dispersive Spectrometer, and by analyzing the elemental change rule of Al2O3-SiC composite ceramics, study the removal mechanism of laser direct etching on Al2O3-SiC composite ceramics, and compare with composite etching of water jet and laser. The results show that: In the process of laser direct etching, Al2O3 mainly happens the molten removal, a large number of tiny molten particles concentrate the etched surface, so the content of aluminum is increased, but for SiC, because of the decomposition needs a more laser energy, so the SiC has a little decomposition. In the process of composite etching of water jet and laser, water jet with certain pressure can wash a lot of molten particles of Al2O3, reducing the accumulation of molten particles of Al2O3, the content of aluminum is decrease, the content of silicon is increased relatively. (C) 2016 The Authors. Published by Elsevier B.V.