4.8 Article

Wavelength-Selective Three-Dimensional Thermal Emitters via Imprint Lithography and Conformal Metallization

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 10, Issue 9, Pages 8173-8179

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.7b16902

Keywords

woodpile structure; imprint lithography; supercritical fluid deposition; conformal coating; wavelength-selective; thermal emitter

Funding

  1. NSF Center for Hierarchical Manufacturing at the University of Massachusetts, Amherst [CMMI-1025020]

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Metallic photonic crystals (MPCs) exhibit wavelength-selective thermal emission enhancements and are promising thermal optical devices for various applications. Here, we report a scalable fabrication strategy for MPCs suitable for high-temperature applications. Well-defined double-layer titanium dioxide (TiO2) woodpile structures are fabricated using a layer-by-layer soft-imprint method with TiO2 nanoparticle ink dispersions, and the structures are subsequently coated with high purity, conformal gold films via reactive deposition from supercritical carbon dioxide. The resulting gold-coated woodpile structures are effective MPCs and exhibit emissivity enhancements at a selective wavelength. Gold coatings deposited using a cold-wall reactor are found to be smoother and result in a greater thermal emission enhancement compared to those deposited using a hot-wall reactor.

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