Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 10, Issue 21, Pages 17639-17645Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.8b03432
Keywords
BioFET; highly sensitive; reusable; membraneless structure; vdW material
Funding
- Gyeonggi Technology Development Program - Gyeonggi Province [2016BB008]
- Basic Research Lab Program through National Research Foundation of Korea (NRF) - Korea Government (MSIP)
- Basic Science Research Program through National Research Foundation of Korea (NRF) - Korea Government (MSIP) [2018R1A2A2A05020475, 2017R1A4A1015400, 2015M3A7B7045496]
- Future Semiconductor Device Technology Development Program - Ministry of Trade, Industry Energy (MOTIE) [10067739]
- Korea Semiconductor Research Consortium (KSRC)
- National Research Foundation of Korea [2018R1A2A2A05020475] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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In recent years when the demand for high-performance biosensors has been aroused, a field-effect transistor (FET)-type biosensor (BioFET) has attracted great interest because of its high sensitivity, label-free detection, fast detection speed, and miniaturization. However, the insulating membrane in the conventional BioFET, which is essential in preventing the surface dangling bonds of typical semiconductors from nonspecific bindings, has limited the sensitivity of biosensors. Here, we present a highly sensitive and reusable membraneless BioFET based on a defect-free van der Waals material, tungsten diselenide (WSe2). We intentionally generated a few surface defects that serve as extra binding sites for the bioreceptor immobilization through weak oxygen plasma treatment, consequently magnifying the sensitivity values to 2.87 X 10(5) A/A for 10 mM glucose. The WSe2 BioFET also maintained its high sensitivity even after several cycles of rinsing and glucose application were repeated.
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