Journal
JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 50, Issue -, Pages 1428-1440Publisher
INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S1600576717012286
Keywords
X-ray reflectometry; inverse problem; model structural reconstruction; multilayers
Categories
Funding
- Russian Foundation for Basic Research (RFBR) [17-52-150006, 15-02-07753]
- Russian Scientific Foundation [RSF-DFG 16-42-01034]
- Russian Science Foundation [16-42-01034] Funding Source: Russian Science Foundation
Ask authors/readers for more resources
An extended model for the reconstruction of multilayer nanostructures from reflectometry data in the X-ray and extreme ultraviolet ranges is proposed. In contrast to the standard model approach, where the transitional region is defined in advance as a specific function, the transition layer is sought as a linear combination of several functions at once in the extended model. This allows one to describe a much wider class of multilayer structures with different dominant physical mechanisms for the formation of transition regions. The extended model occupies an intermediate position between the classical model approach and the so-called model-free methods. The efficiency of the described method is illustrated in detail in numerical simulations and in a real experiment on the annealing of a multilayer Mo/Be mirror.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available