CSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4K and room temperature

The temperature dependence of the electron-beam sensitive resist CSAR 62 is investigated in its negative-tone regime. The writing temperatures span a wide range from 4K to room temperature with the focus on the liquid helium temperature regime. The importance of low temperature studies is motivated by the application of CSAR 62 for deterministic nanophotonic device processing by means of in situ electron-beam lithography. At low temperature, CSAR 62 exhibits a high contrast of 10.5 and a resolution of 49 nm. The etch stability is almost temperature independent and it is found that CSAR 62 does not suffer from peeling which limits the low temperature application of the standard electron-beam resist polymethyl methacrylate. As such, CSAR 62 is a very promising negative-tone resist for in situ electron-beam lithography of high quality nanostructures at low temperature. (C) 2016 American Vacuum Society.