Piezoresistive silicon cantilever covered by ZnO nanorods for humidity sensing

Gravimetric humidity sensing performance is described with piezoresistive silicon cantilevers covered by ZnO nanorods in a low-cost wet chemical deposition process. High sensitivity at small hysteresis between increasing and decreasing humidity loading is observed as well as a good temporal stability at constant humidity and temperature. Due to ease of interfacing with electronics and low-power operation promoted by resonant devices, we expect that the developed sensors will be highly attractive for wearable environmental monitoring applications. (C) 2016 The Authors. Published by Elsevier Ltd.