Journal
ACS PHOTONICS
Volume 4, Issue 6, Pages 1371-1380Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.6b01025
Keywords
mid-infrared sensing; metamaterials; thermal emission; optical sensing; CMOS technology
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Funding
- [ETH-45 14-2]
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Efficient light sources compatible to complementary metal oxide semiconductor (CMOS) technology are key components for low-cost, compact mid-infrared gas sensing systems. In this work we present an on-chip narrowband thermal light source for the mid-infrared wavelength range by combining microelectromechanical system (MEMS) heaters with metamaterial perfect emitter structures. Exhibiting a resonance quality factor of 15.7 at the center wavelength of 3.96 im and an emissivity of 0.99, the demonstrated emitter is a spectrally narrow and efficient light source. We show temperature-stable (resonance wavelength shift 0.04 nm/ C) and angular-independent emission characteristics up to angles of 50 and provide an equivalent circuit model illustrating the structure's resonance behavior. Owing to its spectrally tailored, nondispersive emission, additional filter elements in a free-space optical gas sensing setup become obsolete. In a proof-of-concept demonstration of such a filter-free gas sensing system with CO2 concentrations in the range of 050000 ppm, we observe a 5-fold increase in relative sensitivity compared to the use of a conventional blackbody emitter. Our light source is fully compatible with standard CMOS processes and tunable in emission wavelength through the mid-infrared wavelength band. It paves the way for a new class of highly integrated, low-cost optical gas sensors.
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