Journal
MICROMACHINES
Volume 8, Issue 12, Pages -Publisher
MDPI AG
DOI: 10.3390/mi8120352
Keywords
magnetic sensor; micro-fluxgate sensor; MEMS; Fe-Co-B amorphous ribbon
Categories
Funding
- National Natural Science Foundation of China [61273065]
- National Science and Technology Support Program [2012BAK08B05]
- Natural Science Foundation of Shanghai [13ZR1420800]
- Shanghai Jiao Tong University [AgriX2015005]
- Support fund of Joint research center for advanced aerospace technology of Shanghai Academy of Spaceflight Technology-Shanghai Jiao Tong University [USCAST2015-2]
- Support fund of aerospace technology [15GFZ-JJ02-05]
- Analytical and Testing Center in Shanghai Jiao Tong University
- Center for Advanced Electronic Materials and Devices in Shanghai Jiao Tong University
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This paper reports a novel micro-fluxgate sensor based on a double-layer magnetic core of a Fe-Co-B-based amorphous ribbon. The melt-spinning technique was carried out to obtain a Fe-Co-B-based amorphous ribbon composite of Fe58.1Co24.9B16Si1, and the obtained amorphous ribbon was then annealed at 595 K for 1 h to benefit soft magnetic properties. The prepared ribbon showed excellent soft magnetic behavior with a high saturated magnetic intensity (B-s) of 1.74 T and a coercivity (H-c) of less than 0.2 Oe. Afterward, a micro-fluxgate sensor based on the prepared amorphous ribbon was fabricated via microelectromechanical systems (MEMS) technology combined with chemical wet etching. The resulting sensor exhibited a sensitivity of 1985 V/T, a wide linearity range of +/- 1.05 mT, and a perming error below 0.4 T under optimal operating conditions with an excitation current amplitude of 70 mA at 500 kHz frequency. The minimum magnetic field noise was about 36 pT/Hz(1/2) at 1 Hz under the same excitation conditions; a superior resolution of 5 nT was also achieved in the fabricated sensor. To the best of our knowledge, a compact micro-fluxgate sensor with such a high-resolution capability has not been reported elsewhere. The microsensor presented here with such improved characteristics may considerably enhance the development of micro-fluxgate sensors.
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