Journal
NANO CONVERGENCE
Volume 4, Issue -, Pages -Publisher
SPRINGEROPEN
DOI: 10.1186/s40580-017-0117-y
Keywords
ITO-NPs; Reuse; Reverse reduction in situ dispersion; ITO target; TCE layer
Funding
- Industrial Original Technology Development Program of the Korea Evaluation Institute of Industrial Technology (KEIT) - Ministry of Knowledge Economy [10048248]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10048248] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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In this study, ITO nanoparticles (ITO-NPs) were reused from ITO target scraps to synthesize low cost ITO-NPs and to apply to make sputtering target for transparent conductive electrodes (TCEs). By control ling heat-treatment temperature as 980 degrees C, we achieved reused ITO-NPs having Brunauer, Emmett and Teller specific surface area (BET SSA) and average particle size 8.05 m(2)/g and 103.8 nm, respectively. The BET SSA decreases along with increasing heattreatment temperature. The ITO-NPs were grown as round mound shape, and highly crystallized to (222) preferred orientations. Also, applying the reused ITO-NPs, we achieved an ITO target of which density was 99.6%. Using the ITO target, we achieved high quality TCE layer of which sheet resistance and optical transmittance at 550 nm were 29.5 Omega/sq. and 82.3%. Thus, it was confirmed that the reused ITO-NPs was feasible to sputtering target for TCEs layer.
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