Journal
ELECTROCHIMICA ACTA
Volume 224, Issue -, Pages 235-242Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.electacta.2016.12.029
Keywords
Ionic transport; Barrier effect; Dry anodic oxidation; Aluminum; Amorphous aluminum oxide film
Categories
Funding
- Ministry of Science and Technology of China [2015CB654601]
- National Science Foundation of China [51272177]
- International Science AMP
- Technology Cooperation Program of China [2013DFR50470]
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Dry anodic oxidation as an effective electrical self-healing method in a solid-state Al2O3 capacitor was investigated in terms of ionic transport study. Sol-gel-derived amorphous aluminum oxide (AmAO) film as dielectric and aluminum (Al) film as top electrode of the capacitor were prepared on platinized silicon substrates. When a negative voltage was applied to the Al electrode pad, the ionic transport would induce the failure of the Al electrode. Nevertheless, such failure could be inhibited by the barrier effect of an anodic aluminum oxide (AAO) layer formed at the Al/AmAO interface when positive voltage was applied to the Al electrode pad previously. The barrier effect of the AAO layer was controlled by the maximum applied positive voltage. An ionic transport model was proposed to explore the dry anodic oxidation in the solid-state Al2O3 capacitor. (C) 2016 Elsevier Ltd. All rights reserved.
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