Impact of Source/Drain Metal Work Function on the Electrical Characteristics of Anatase TiO2-Based Thin Film Transistors

Thin film transistors (TFTs) with anatase-TiO2 channel material deposited on an SiO2/Si substrate by atomic layer deposition are fabricated to investigate the effect of the source/drain (S/D) metal work function on the electrical characteristics of the TFTs. S/D materials such as aluminum, silver, and gold are selected for this study. From the measured current-voltage characteristic curves in the dark and at room temperature, it is demonstrated that the anatase TiO2-based TFT with Ag S/D material shows the highest on/off-current ratio (similar to 10(5)), field effect mobility in the saturation regime (mu(sat) = 5.17 cm(2)V(-1)s(-1)), and saturation current (I-DS,I-sat similar to 0.47 mA). (C) 2017 The Electrochemical Society. All rights reserved.