Journal
INTERNATIONAL JOURNAL OF MECHANICS AND MATERIALS IN DESIGN
Volume 14, Issue 3, Pages 313-327Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s10999-017-9376-3
Keywords
Soft metal; DLC; Nanocomposite; RF magnetron sputter; Tribology
Funding
- Japan Society for the Promotion of Science (JSPS) [26420093]
- Institute of Fluid Science of Tohoku University [J14038, J15018]
- [25220902]
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This work reports the characteristics and tribological properties of both Ag/DLC nanocomposite coatings (RF-Ag-DLC) and Cu/DLC nanocomposite coatings (RF-Cu-DLC) with hydrogen-free DLC matrix deposited by RF magnetron sputtering using a concentric composite target (CCT). The CCT consisted of a C base target and metal tablet, and the tablet was located on the center of the base target concentrically where the etching rate by Ar ions is extremely low. By changing the diameter of Ag or Cu tablets in CCT, RF-Ag-DLC with an Ag concentration ranging from 6 to 65 at.% and RF-Cu-DLC with Cu concentration ranging from 7 to 75 at.% can be prepared. These coatings show a granular structure having Ag or Cu nano-crystals with a diameter ranging from 5 to 10 nm dispersed homogeneously in the hydrogen-free DLC matrix. The friction coefficient of DLC varied depending on the species and content of metal. The transition of the friction coefficient became stable when metal-rich tribofilms formed on the counterfaces.
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