Journal
CERAMICS INTERNATIONAL
Volume 43, Issue 7, Pages 5842-5846Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2017.01.130
Keywords
TiO2 gas sensor; Substrate impurity; Oxygen sensing properties; High temperature
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Funding
- Specialized Research Fund for the Doctoral Program of Higher Education [20130203120016]
- Natural Science Basic Research Plan in Shaanxi Province of China [2015JQ6252]
- Ningbo Natural Science Foundation [2015A610109, 2015A610037, 2016A610029]
- Fundamental Research Funds for the Central Universities [JB161405, JB161403]
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It is well known that surface state of substrates greatly influences the sensing characteristics of gas sensors. In this work, alumina (Al2O3) substrates with different distribution of surface impurity concentrations were utilized to prepare TiO2 based lambda sensors. Several methods, including XPS, XRD and SEM were employed to exam the substrate surface impurity contents, as well as the structure of the sensing films and the interface morphology between the substrates and sensing films. The results indicated that the gas sensors prepared on alumina substrates containing higher Ca impurities displayed lower oxygen sensitivities and longer response times at high operating temperatures above 600 degrees C. Therefore, it was concluded that Ca impurities on alumina substrates had to be limited to lower possible levels when fabricating TiO2 lambda sensors.
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