Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 26, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/aa52a8
Keywords
microplasma; breakdown; transition; scaling; Paschen's law; PIC simulation; fluid simulation
Categories
Funding
- National Research Foundation of Korea [2015R1D1A1A01061556, 2015M3A9E2066986, 2016K1A4A4A01922028]
- Asia-Pacific Center for Theoretical Physics
- National Research Foundation of Korea [2015M3A9E2066986, 2016K1A4A4A01922687, 10Z20130000001] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Ask authors/readers for more resources
The single particle motion analysis and particle-in-cell merged with Monte Carlo collision (PIC/MCC) simulations are compared to explain substantial breakdown voltage reduction for helium microwave discharge above a critical frequency corresponding to the transition from the drift-dominant to the diffusion-dominant electron loss regime. The single particle analysis suggests that the transition frequency is proportional to the product of p(-m) and d(-(m+1)) where p is the neutral gas pressure, d is the gap distance, and m is a numerical parameter, which is confirmed by the PIC simulation. In the low-frequency or drift-dominant regime, i. e., gamma-regime, the secondary electron emission induced by ion drift motion is the key parameter for determining the breakdown voltage. The fluid analysis including the secondary emission coefficient, gamma, induces the extended Paschen law that implies the breakdown voltage is determined by pd, f/p, gamma, and d/R where f is the frequency of the radio or microwave frequency source, and R is the diameter of electrode. The extended Paschen law reproduces the same scaling law for the transition frequency and is confirmed by the independent PIC and fluid simulations.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available