Growth and characterization of nanostructured CuO films via CBD approach for oxygen gas sensing

Nanostructured copper oxide (CuO) films were grown on portable IDE circuit silicon-based by low-cost chemical bath deposition (CBD) technique at three different deposition times (3 h, 5 h and 7 h). The effect of deposition times on the morphological, structural, optical and sensing properties of the nanostructured films were investigated. From the morphological and structural properties, the nanostructured film deposited at 5 h was found to have homogenous surface of CuO nanowhiskers and high crystallinity with tenorite phase compared to 3 h and 7 h films. Besides, there is no heat treatment required in order to produce CuO nanostructures film with tenorite phase. The sensing response (resistance changes) of as-synthesized films to concentration of oxygen (O-2) gas also was compared. Film resistance of CuO nanostructures was studied in an environment of dry air loaded (gas sensor chamber) with 30 % of O-2 gas. The results revealed that the deposition time causes significant effect on the sensing performance of nanostructured CuO to O-2 gas.