Journal
AIP ADVANCES
Volume 7, Issue 5, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4982919
Keywords
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Funding
- National Natural Science Foundation of China [61464009]
- Major Fundamental Research Program of Inner Mongolia Autonomous Region [20130902]
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ITO/Ag/ITO (IAI) trilayer films were deposited on glass substrate by radio frequency magnetron sputtering at room temperature. A high optical transmittance over 94.25% at the wavelength of 550 nm and an average transmittance over the visual region of 88.04% were achieved. The calculated value of figure of merit (FOM) reaches 80.9 10(-3) Omega(-1) for IAI films with 15-nm-thick Ag interlayer. From the morphology and structural characterization, IAI films could show an excellent correlated electric and optical performance if Ag grains interconnect with each other on the bottom ITO layer. These results indicate that IAI trilayer films, which also exhibit lowsurface roughness, will be well used in optoelectronic devices. (C) 2017 Author(s).
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