Journal
ADVANCED MATERIALS
Volume 29, Issue 19, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201606482
Keywords
chiral optical antennas; programmable folding; focused ion beam; nanofabrication; optical rotation
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Funding
- Research Project of Advanced Fabrication Technology of China
- Research Fund for the Doctoral Program of Higher Education [20130001110007]
- National Natural Science Foundation of China [50775001, 11374152, 11574142]
- National Key Technologies R&D Program of China [2016YFA0201104]
- National Basic Research Program of China (973 Program) [2015CB352100]
- Research Fund of Zhongxing Telecommunication Equipment Corporation
- Nanjing University of Posts and Telecommunications Scientific Research Foundation [NY214189, NY215146]
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3D structures with characteristic lengths ranging from nanometer to micrometer scale often exhibit extraordinary optical properties, and have been becoming an extensively explored field for building new generation nanophotonic devices. Albeit a few methods have been developed for fabricating 3D optical structures, constructing 3D structures with nanometer accuracy, diversified materials, and perfect morphology is an extremely challenging task. This study presents a general 3D nanofabrication technique, the focused ion beam stress induced deformation process, which allows a programmable and accurate bidirectional folding (-70 degrees-+90 degrees) of various metal and dielectric thin films. Using this method, 3D helical optical antennas with different handedness, improved surface smoothness, and tunable geometries are fabricated, and the strong optical rotation effects of single helical antennas are demonstrated.
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