Journal
AIP ADVANCES
Volume 7, Issue 5, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4973696
Keywords
-
Ask authors/readers for more resources
Two-dimensional electron systems found at the interface of SrTiO3-based oxide heterostructures often display anisotropic electric transport whose origin is currently under debate. To characterize transport along specific crystallographic directions, we developed a hard-mask patterning routine based on an amorphous CeO2 template layer. The technique allows preparing well-defined microbridges by conventional ultraviolet photolithography which, in comparison to standard techniques such as ion-or wet-chemical etching, does not induce any degradation of interfacial conductance. The patterning scheme is described in detail and the successful production of microbridges based on amorphous Al2O3-SrTiO3 heterostructures is demonstrated. Significant anisotropic transport is observed for T < 30 K which is mainly related to impurity/defect scattering of charge carriers in these heterostructures. (C) 2017 Author(s).
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available