Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 27, Issue 4, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/aa5fa5
Keywords
cavitation; microchannel; two phase flows
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Funding
- C.N.R.S. (Projets exploratoires INSIS)
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We present a simple process to perform microchannels in which cavitating two phase flows are easily producible. Up to now, hydrodynamic cavitation 'on a chip' was reached with small flow rates inside microchannels whose micromachining had involved a deep reactive ion etching (D-RIE). The process we present here does not require a D-RIE reactor, as it is only funded on a wet etching of silicon. It leads to a so-called microstep profile, and large cavitating flow rates become possible together with moderate pressure drops.
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