Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 9, Issue 17, Pages 15192-15201Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.7b02833
Keywords
graphene; piezoresistive; doping; nitrogen plasma; pressure sensor
Funding
- High Impact Research Grant by the Ministry of Higher Education of Malaysia [UM.C/625/1/HIR/MOHE/SC/06]
- Newton-Ungku Omar Fund from the British Council [6386300-13501]
- MIGHT
- Fundamental Research Grant Scheme (FRGS) from the British Council [FP011-2015A]
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This paper presents a straightforward plasma treatment modification of graphene with an enhanced piezoresistive effect for the realization of a high-performance pressure sensor. The changes in the graphene in terms of its morphology, structure, chemical composition, and electrical properties after the NH3/Ar plasma treatment were investigated in detail. Through a sufficient plasma treatment condition, our studies demonstrated that plasma-treated graphene sheet exhibits a significant increase in sensitivity by one order of magnitude compared to that of the unmodified graphene sheet. The plasma-doping introduced nitrogen (N) atoms inside the graphene structure and was found to play a significant role in enhancing, the pressure sensing performance due to the tunneling behavior from the localized defects. The high sensitivity and good robustness demonstrated by the plasma-treated graphene sensor suggest a promising route for simple, low-cost, and, ultrahigh resolution flexible sensors.
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