Journal
RSC ADVANCES
Volume 7, Issue 45, Pages 27969-27973Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c7ra03642f
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Funding
- Brain Korea 21 Plus Project [T1300304]
- Carbon-based Technology for the Internet-ofThings Era Project [K1518861]
- National Research Foundation of Korea [21A20131612106] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We report the synthesis of large-scale continuous MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD). As-grown thin films were composed of a continuous monolayer of MoSe2 and extended up to a millimeter scale. The CVD-grown monolayer MoSe2 films were uniform in thickness and highly crystalline with hexagonal crystal structures. Raman and photoluminescence spectra showed that CVD-grown monolayer MoSe2 films have similar vibrational and optical properties to those of mechanically exfoliated monolayer MoSe2. These results demonstrate that the CVD-grown monolayer MoSe2 films have reasonably high quality comparable to that of mechanically exfoliated monolayer MoSe2 flakes.
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