Journal
OPTICAL MATERIALS EXPRESS
Volume 7, Issue 8, Pages 2727-2739Publisher
OPTICAL SOC AMER
DOI: 10.1364/OME.7.002727
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Funding
- National Science Foundation [ECCS 1541678, ECCS 1643118]
- AFOSR MURI [FA9550-14-1-0389, DGE-1069240]
- U.S. Department of Energy, Office of Basic Energy Sciences [DE-SC0012704]
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1307948] Funding Source: National Science Foundation
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Transparent conductive oxides (TCOs) have emerged as alternative plasmonic materials in recent years to replace noble metals. The advantages of TCOs include CMOS compatibility, tunability of optical and structural properties, and reduced losses. In this work, we demonstrate how post-deposition annealing of indium tin oxide (ITO) films in oxygen atmosphere allows for tuning their optical dispersion properties to the mid-infrared spectral range while simultaneously reducing their absorption losses. In particular, we show a materials strategy that extends the epsilon-near-zero (ENZ) point of ITO from the near-infrared to the mid-infrared range. This is demonstrated by fabricating periodic arrays of ITO discs of varying diameters and characterizing their plasmonic resonances in the mid-infrared range from lambda = 5 to 10 mu m. The developed ITO plasmonic structures pave the way to the development of novel infrared active devices for sensing and spectroscopy on a silicon-compatible platform. (C) 2017 Optical Society of America
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