Journal
30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)
Volume -, Issue -, Pages 1204-1207Publisher
IEEE
Keywords
-
Categories
Funding
- Brian Power and Joel Martin of the US Army Research Laboratory (ARL)
- Steven Isaacson of General Technical Services
- Berkeley Sensor and Actuator Center (BSAC) Industrial Members
Ask authors/readers for more resources
Wide bandwidth for an air-coupled piezoelectric micromachined transducer (PMUT) is important to achieve short pulse transmission and reception in pulse-echo imaging with high axial resolution. Here, we report experimental results on an air-coupled PMUT with high displacement sensitivity up to 5500 nm/V, high 3 dB bandwidth of 20.3 kHz, and correspondingly short transmission time of 0.05 ms, achieved through dc bias tuning. The dc bias controls the polarization and intrinsic stress of the piezoelectric layer, tuning frequencies of two closely spaced resonance modes of the ribbon-shaped PMUT. The modes nearly overlapped when applying small dc bias around +/- 5 V, enabling wideband and short pulse transmission.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available