Journal
ADVANCED ENGINEERING MATERIALS
Volume 19, Issue 7, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adem.201600870
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Funding
- SABIC Global Technologies B.V. [G01140407]
- Institute for Information & communications Technology Promotion (IITP) grant - Korea government (MSIP) [B0101-16-0133]
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For the fabrication of thin film encapsulation (TFE), sequential deposition of organic and inorganic layers is inevitable. A single-chamber system of initiated chemical vapor deposition (iCVD) and atomic layer deposition (ALD) is reported previously. Here, the substrate temperature (T-s) of the iCVD is aligned with that of ALD to facilitate the transition of the deposition mode by removing delays caused by repeated heating/cooling of the substrate. While increasing the T-s of iCVD from 40 to 90 degrees C, the process pressure is optimized so that the properties of the organic film are unchanged from that deposited with 40 degrees C. The T-s alignment significantly reduced the time delay during transition of the deposition mode, and the fabrication of the TFE is expedited.
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