Journal
JOURNAL OF COMPUTATIONAL ELECTRONICS
Volume 16, Issue 3, Pages 987-994Publisher
SPRINGER
DOI: 10.1007/s10825-017-1033-4
Keywords
Touch mode; Capacitive pressure sensor; Double touch mode; Capacitive sensitivity; Capacitance in near-linear range; Mechanical sensitivity
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Microelectromechanical system-based capacitive pressure sensors have seen significant advancements in modeling and design. This paper provides a complete analysis of a novel improvement to existing models of the touch mode capacitive pressure sensor. An in-depth, step-by-step derivation of the capacitance, capacitive sensitivity and mechanical sensitivity is examined for the double-sided touch mode capacitive pressure sensor. The results generated are modeled and examined using MATLAB. Comparisons with previous models clearly delineate the improved performance in terms of capacitance and sensitivity. The analysis conducted dovetail perfectly with the modeled results.
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