STUDY OF THE PULSED LASER DEPOSITION PHENOMENA BY MEANS OF COMSOL MULTIPHYSICS

In this paper, thin films behavior obtained by Pulsed Laser Deposition (PLD) have been analyzed by means COMSOL Multiphysics, taking into account various experimental parameters: laser fluence, laser pulse width, laser wavelength, the temperature achieved during ablation, the target material type, the temperature of the support, the distance between target and support, etc. The obtained results are in very good agreement with the experimental. Moreover, the current model may be easily furthermore applied to any other film deposition technique by changing parameters values as needed in the experiments