Journal
NANOPHOTONICS
Volume 6, Issue 5, Pages 923-941Publisher
WALTER DE GRUYTER GMBH
DOI: 10.1515/nanoph-2017-0008
Keywords
Nanotechnology; nanofabrication; nanophotonics; 3D fabrication; nanoscale
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Funding
- Australian Research Council [DP130101205, DP170100131]
- Swinburne - University
- Window on Photonics RD, Ltd.
- Research Council of Lithuania [LAT-01/2016]
- EU-H2020 Research and Innovation program (NFFA-Europe) [654360]
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The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1-100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidicsand/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.
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