Journal
JOURNAL OF OPTICS
Volume 19, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/2040-8986/aa8fbc
Keywords
phase shifting interferometry; optical modulators; liquid-crystal devices; polarization
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Funding
- National Science Foundation of China (NSFC) [11534006, 11474156]
- National Key R&D Program of China [2017YFA0303700]
- Collaborative Innovation Center of Advanced Microstructures
- Collaborative Innovation Center of Solid-State Lighting and Energy-Saving Electronics
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As spatial light modulators (SLMs) are becoming flexible and the preferred device for light steering, the SLM's modulation calibration still remains challenging. No pixel-addressable measurement of the SLM has yet been practically implemented. We present a quantitative phase measurement and calibration method for a parallel aligned liquid crystal spatial light modulator (PAL-SLM) based on Pancharatnam phase-shifting interferometric microscopy. The pixel-wise phase of SLM can be detected from microscopic interference pattern formed from two orthogonally polarized light waves reflected off the PAL-SLM. The wave phase is modulated or non-modulated depending on its polarization direction parallel or orthogonal to the liquid crystal director. Owing to self-referencing common-path interferometric microscopic imaging, the proposed method is quite robust against environmental disturbance and enables a high-precision pixel-wise characterization of SLM.
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