Journal
APPLIED PHYSICS LETTERS
Volume 111, Issue 9, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4996993
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We report successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270 x 96-mu m resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 mu V/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids. Published by AIP Publishing.
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