Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 9, Issue 38, Pages 33129-33136Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.7b09837
Keywords
polymer/metal/polymer electrode; Flexible; polymer composite target; thin film heater; roll-to-roll sputtering
Funding
- Project of Energy Technology Development - Ministry of Trade, Industry and Energy [20173030014330]
- Core Research Project at Korea Research Institute of Chemical Technology (KRICT) - Ministry of Science and ICT [KK-1706-000]
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Polymer/metal/polymer and polymer/metal/inorganic trilayer-structured transparent electrodes with fluorocarbon plasma polymer thin film heaters have been proposed. The polymer/metal/polymer and polymer/metal/inorganic transparent conducting thin films fabricated on a large-area flexible polymer substrate using a continuous roll-to-roll sputtering process show excellent electrical properties and visible-light transmittance. They also exhibit water-repelling surfaces to prevent wetting and to remove contamination. In addition, the adoption of a fluorocarbon/metal/ fluorocarbon film permits an outer bending radius as small as 3 mm. These films have a sheet resistance of less than 5 Omega sq(-1), sufficient to drive light-emitting diode circuits. The thin film heater with the fluorocarbon/Ag/SiNx structure exhibits excellent heating characteristics, with a temperature reaching 180 degrees C under the driving voltage of 13 V. Therefore, the proposed polymer/metal/polymer and polymer/metal/inorganic transparent conducting electrodes using polymer thin films can be applied in flexible and rollable displays as well as automobile window heaters and other devices.
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