Journal
BIOMICROFLUIDICS
Volume 11, Issue 6, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.5001145
Keywords
-
Categories
Funding
- INSERM (Plan Cancer, Physicancer Program, Dynamo project)
- mobility program of the Programme Avenir Lyon Saint-Etienne (PALSE)
Ask authors/readers for more resources
This paper describes a reproducible method for mu m precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2 mu m. Published by AIP Publishing.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available