Journal
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
Volume 56, Issue 45, Pages 14071-14074Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/anie.201707525
Keywords
oligomerization; silanes; silicon films; thin films; UV/Vis spectroscopy
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Funding
- FFG (Austrian Research Promotion Agency, Wien, Austria) [838476]
- Evonik Creavis GmbH (Marl, Germany)
- NAWI Graz
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Herein a convenient synthetic method to obtain 2,2,3,3-tetrasilyltetrasilane 3 and 2,2,3,3,4,4-hexasilylpentasilane 4 on a multigram scale is presented. Proton-coupled Si-29 NMR spectroscopy and single-crystal X-ray crystallography enabled unequivocal structural assignment. Owing to their unique properties, which are reflected in their nonpyrophoric character on contact with air and their enhanced light absorption above 250 nm, 3 and 4 are valuable precursors for liquid-phase deposition (LPD) and the processing of thin silicon films. Amorphous silicon (a-Si:H) films of excellent quality were deposited starting from 3 and characterized by conductivity measurements, ellipsometry, optical microscopy, and Raman spectroscopy.
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