Journal
CHEMISTRY OF MATERIALS
Volume 29, Issue 19, Pages 8531-8538Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.chemmater.7b03585
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Funding
- Center for Sustainable Materials Chemistry - U.S. National Science Foundation under CCI [CHE- 1606982]
- W. M. Keck Foundation
- M. J. Murdock Charitable Trust
- ONAMI
- Air Force Research Laboratory [FA8650-05-1-5041]
- NSF [0923577, 0421086]
- University of Oregon
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Aqueous solution deposition has emerged as a potentially scalable, high-throughput route to functional metal oxide thin films. Aqueous routes, however, generally require elevated processing temperatures to produce fully condensed films that are resistant to water absorption. Herein, we report a low-processing-temperature method for preparing more fully condensed, stable metal oxide films from aqueous precursors. We show that a steam anneal at <= 200 degrees C reduces residual nitrates in zinc oxide, yttrium aluminum oxide, and lanthanum zirconium oxide (LZO) films. An in-depth study on LZO dielectric films reveals steam annealing also reduces residual chloride content, increases resistance to post-anneal water absorption, eliminates void formation, and enhances the dielectric constant. This investigation demonstrates that steam annealing directly affects the decomposition temperatures and chemical evolution of aqueous precursors, suggesting a general means for producing high-quality films at low processing temperatures.
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