Journal
ULTRAMICROSCOPY
Volume 177, Issue -, Pages 69-77Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2017.01.010
Keywords
Annular dark field scanning transmission electron microscopy (ADF STEM); Statistical parameter estimation theory; Atom-counting; Beam-sensitive nanomaterials
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Funding
- Research Foundation Flanders (FWO) [G.0374.13N, G.0368.15N, G.0369.15N, WO.010.16N]
- European Union [312483]
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A hybrid statistics-simulations based method for atom-counting from annular dark field scanning transmission electron microscopy (ADF STEM) images of monotype crystalline nanostructures is presented. Different atom-counting methods already exist for model-like systems. However, the increasing relevance of radiation damage in the study of nanostructures demands a method that allows atom-counting from low dose images with a low signal-to-noise ratio. Therefore, the hybrid method directly includes prior knowledge from image simulations into the existing statistics-based method for atom-counting, and accounts in this manner for possible discrepancies between actual and simulated experimental conditions. It is shown by means of simulations and experiments that this hybrid method outperforms the statistics based method, especially for low electron doses and small nanoparticles. The analysis of a simulated low dose image of a small nanoparticle suggests that this method allows for far more reliable quantitative analysis of beam-sensitive materials. (C) 2017 Elsevier B.V. All rights reserved.
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