Journal
ULTRAMICROSCOPY
Volume 172, Issue -, Pages 75-81Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2016.10.003
Keywords
High-resolution (scanning) transmission electron microscopy (HR (S) TEM); Imaging STEM (ISTEM); Quantitative electron microscopy; Statistical parameter estimation theory; Precise determination of atomic column locations
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Funding
- Research Foundation Flanders (FWO, Belgium) [G.0374.13N, G.0368.15N, G.0369.15N]
- Deutsche Forschungsgemeinschaft [RO 2057/4-2]
- European Union [312483 - ESTEEM2]
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Recently, imaging scanning transmission electron microscopy (ISTEM) has been proposed as a promising new technique combining the advantages of conventional TEM (CTEM) and STEM (Rosenauer et al., 2014 [1]). The ability to visualize light and heavy elements together makes it a particularly interesting new, spatially incoherent imaging mode. Here, we evaluate this technique in term of precision with which atomic column locations can be measured. By using statistical parameter estimation theory, we will show that these locations can be accurately measured with a precision in the picometer range. Furthermore, a quantitative comparison is made with HAADF STEM imaging to investigate the advantages of ISTEM.
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