ALD Grown ZnO on Polymeric Template

ZnO thin film was grown on polystyrene template using atomic layer deposition (ALD) technique. The synthesized thin film was characterized using X-ray reflectivity, X-ray diffraction, and photoluminescence. X-ray reflectivity confirms the growth of ZnO thin film with bulklike electron density, on top of polystyrene film without causing any perturbation in the underneath polymeric template. The X-ray diffraction result reveals the crystalline structure of the ALD grown ZnO. Photoluminescence (PL) study of ZnO thin film on polymeric template shows the presence of strong characteristic near band edge emission (NBE) in the UV range along with a defect related deep level emission (DLE) in the visible region. The results confirm the growth of good quality crystalline ZnO thin film on polymeric template maintaining a sharp interface in metal-oxide/polymer hybrid structure.