Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 26, Issue 11, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/aa9248
Keywords
modeling of magnetized technological plasmas; magnetron; HiPIMS
Categories
Funding
- Deutsche Forschungsgemeinschaft (DFG) via Sonderforschungsbereich [SFB TR 87]
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This publication reports analytical and numerical results concerning the interaction of gyrating electrons with a plasma boundary sheath, with focus on partially magnetized technological plasmas. It is assumed that the electron Debye length lambda(D) is much smaller than the electron gyroradius r(L), and r(L) in turn much smaller than the mean free path. and the gradient length L of the fields. Focusing on the scale of the gyroradius, the sheath is assumed as infinitesimally thin (lambda(D) -> 0), collisions are neglected (lambda -> infinity), the magnetic field is taken as homogeneous, andelectric fields (= potential gradients) in the bulk are neglected (L -> infinity). The interaction of anelectron with the electric field of the plasma boundary sheath is represented by a specular reflection v -> v - 2v . e(z)e(z) of the velocity v at the plane z = 0 of. a naturally oriented Cartesianco ordinate system (x, y, z). The electron trajectory is then given as sequences of helical sections, with the kinetic energy epsilon and the canonical momenta p(x) and p(y) conserved, but not the position of the axis (base point R-0), the. slope (pitch angle chi), and the phase (gyrophase phi). A 'virtual interaction' which directly maps the incoming electrons to the outgoing ones is introduced and studied in dependence of the angle gamma between the field and the sheath normal e(z). The corresponding scattering operator is constructed, mathematically characterized, and given as an infinite matrix. An equivalent boundary condition for a transformed kinetic model is derived.
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