Journal
MATERIALS TODAY-PROCEEDINGS
Volume 4, Issue 5, Pages 6060-6064Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.matpr.2017.06.094
Keywords
Indium tin oxide; Glancing-angle deposition; Electron beam evaporation; Anti-reflection
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Funding
- School of Energy, Environment and Materials, King Mongkut's University of Technology Thonburi (KMUTT)
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In this study, we investigated the effects on the film thickness of the vertically aligned indium-doped tin oxide nanorods (ITO NRs). The ITO nanorods of deposited time at 180 to 780 sec were deposited on the silicon wafers and ITO-coated glass substrate by the ion-assisted electron-beam evaporation with the glancing-angle deposition technique. The physical microstructures and optical properties of the prepared samples have been investigated by grazing-incident X-ray diffraction (GIXRD), field-emission scanning electron microscopy (FE-SEM), and spectrophotometry. From the results, the ITO nanorods indicated the bixbite structures. The FE-SEM micrographs showed the changes of the physical morphologies based on the increased film thickness. The angle-dependent transmission as measured from -80 degrees to 80 degrees incident angles demonstrated the increased optical transmission from the vertically aligned ITO nanorods, compared to that of the ITO-coated glass. The enhancement of the optical transmission was related to the anti-reflection and light-scattering properties of the ITO nanorods, and offered a great potential for solar cell applications. (C) 2017 Elsevier Ltd. All rights reserved.
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