Journal
DIAMOND AND RELATED MATERIALS
Volume 80, Issue -, Pages 93-98Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2017.09.020
Keywords
Surface conductive layer; Hydrogen-terminated diamond; Gold ohmic contact; Sheet resistance; Chemical vaper deposition; Current-voltage measurement
Categories
Funding
- Japan Society for the Promotion of Science (JSPS) [26220903, 26246001, 15H03980]
- Grants-in-Aid for Scientific Research [17J08746, 26220903] Funding Source: KAKEN
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The sheet resistance (R-sk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that R-sk is about similar to 200 times larger than the sheet resistance, R-sh, in the open areas without Au-electrodes. The specific contact resistance, R-c, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, R-c is suggested to be of the order of 1 x 10(-3)-1 X 10(-4) Omega CM2.
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