Journal
SURFACE AND INTERFACE ANALYSIS
Volume 50, Issue 1, Pages 87-89Publisher
WILEY
DOI: 10.1002/sia.6339
Keywords
detectability; detection limits; peak area; uncertainty; XPS
Categories
Funding
- Metrology for Advanced Coatings and Formulated Products theme of the National Measurement System Programme of the UK Department of Business, Energy and Industrial Strategy
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This International Standard specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.
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