Journal
SMALL
Volume 13, Issue 26, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.201700639
Keywords
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Categories
Funding
- National Key Research and Development Program of China [2016YFA0202603, 2016YFA0202604]
- National Basic Research Program of China [2013CB934103]
- Programme of Introducing Talents of Discipline to Universities [B17034]
- National Natural Science Foundation of China [51521001, 51502227, 51579198]
- China Postdoctoral Science Foundation [2015T80845]
- Hubei Province Natural Science Fund [2016CFB582]
- Fundamental Research Funds for the Central Universities [WUT: 2016III001, 2016III005]
- China Scholarship Council [201606955094, 201606955096]
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A novel process to fabricate a carbon-microelectromechanical-system-based alternating stacked MoS2@rGO-carbon-nanotube (CNT) micro-supercapacitor (MSC) is reported. The MSC is fabricated by successively repeated spin-coating of MoS2@rGO/photoresist and CNT/photoresist composites twice, followed by photoetching, developing, and pyrolysis. MoS2@rGO and CNTs are embedded in the carbon microelectrodes, which cooperatively enhance the performance of the MSC. The fabricated MSC exhibits a high areal capacitance of 13.7 mF cm(-2) and an energy density of 1.9 mu Wh cm(-2) (5.6 mWh cm(-3)), which exceed many reported carbon-and MoS2-based MSCs. The MSC also retains 68% of capacitance at a current density of 2 mA cm(-2) (5.9 A cm(-3)) and an outstanding cycling performance (96.6% after 10 000 cycles, at a scan rate of 1 V s(-1)). Compared with other MSCs, the MSC in this study is fabricated by a low-cost and facile process, and it achieves an excellent and stable electrochemical performance. This approach could be highly promising for applications in integration of micro/nanostructures into microdevices/systems.
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