Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 252, Issue -, Pages 1163-1168Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2017.07.013
Keywords
Gas sensor; Gaseous ethanol; Tin oxide; Nickel oxide; Heterojunction
Funding
- Shanghai Pujiang Program [14PJ1403600]
- National Natural Science Foundation of China [61176108]
- PCSIRT, Huaian Applied Research [HAG2014034]
- Research Innovation Foundation of ECNU [78210245]
- Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry
- Science and Technology Commission of Shanghai Municipality [14DZ2260800]
- Shanghai Key Laboratory of Multidimensional Information Processing, East China Normal University
- City University of Hong Kong Applied Research Grant (ARG) [9667104, 9667122]
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The application of conventional tin oxide thin film sensors is limited by its low response. In this study, a heterojunction thin film composed of nickel oxide deposited by electron beam evaporation and tin oxide prepared by radio-frequency (RF) magnetron sputtering has enhanced gaseous ethanol sensing properties. The 5 nm NiO/100 nm SnO2 gas sensor shows the excellent response 7.9 at 250 degrees C for 100 ppm gaseous ethanol, good reproducibility, as well as good linearity. In addition, this sensor can measure the ultra-low concentration of gaseous ethanol, and the concentration can be as low as 100 ppb. The gas sensitive properties is related to the thickness of nickel oxide and the mechanism is discussed. (c) 2017 Elsevier B.V. All rights reserved.
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