Design of a piezoelectric pump with dual vibrators

The structures and working principles of a piezoelectric pump with dual vibrators are described in this paper. The output performance of the pump was analyses under different working modes. The experimental results demonstrate that changing the driving strategy can vary the performance. When the driving voltage is 60 V at 160 Hz, the maximum output pressure of the pump in the asynchronous mode is 2.18 kPa. The performance of the upper actuator working alone is better than the lower actuator working alone, and the maximum output pressure in this case is 1.3 kPa. Taking the piezoelectric pump with a single vibrator as a typical example, an optimal design method has been applied on the check valves. The performance of the pump with wheel valves is better than that with cantilever valves; the optimum thickness of the check valves is 0.188 mm. (C) 2017 Published by Elsevier B.V.