Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 66, Issue 2, Pages 683-705Publisher
ELSEVIER
DOI: 10.1016/j.cirp.2017.05.004
Keywords
Nanomanufacturing; Manufacturing; Metrology
Funding
- National Natural Science Foundation [61635008, 51320105009, 91423101]
- National Key Research & Development Program [2016YFB1102200]
- State Administration of Foreign Experts Affairs
- Ministry of Education of China [B07014]
- Grants-in-Aid for Scientific Research [15H05759] Funding Source: KAKEN
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Nanomanufacturing involves scaled-up, reliable, and cost-effective manufacturing of nanoscale materials, structures, devices, and systems. Nanomanufacturing methods can be classified into top down and bottom-up approaches, including additive, subtractive, and replication/mass conservation processes. These include a cluster of various techniques such as nanomachining, nanofabrication, and nanometrology to produce nanotechnology components and conduct evaluation. This paper mainly focuses on the manufacturing methods for complex shapes or structures, such as textures on curves and hierarchical structures, and outlines the research perspectives and the current application status of nanomanufacturing fundamentals and key technologies. (C) 2017 Published by Elsevier Ltd on behalf of CIRP.
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